Author:
Alsem D.H.,Boyce B.L.,Stach E.A.,Ritchie R.O.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. D.H. Alsem, M.T. Dugger, E.A. Stach, R.O. Ritchie, Micron-scale friction and sliding wear of polycrystalline silicon thin structural films in ambient air, Journal of Microelectromechanical Systems, accepted for publication (June 2008).
5. Strength distributions in polycrystalline silicon MEMS;Boyce;Journal of Microelectromechanical Systems,2006
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