The sliding friction and wear behavior of single-crystal, polycrystalline and oxidized silicon-Reference-Cited by-同舟云学术

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The sliding friction and wear behavior of single-crystal, polycrystalline and oxidized silicon

Published:1994-01 Issue:1-2 Volume:171 Page:25-32
ISSN:0043-1648
Container-title:Wear
language:en
Short-container-title:Wear

Author:

Venkatesan Sreekanth,Bhushan Bharat

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics

Reference14 articles.

1. Silicon as a mechanical material;Petersen,1982

2. Silicon microme-chanical devices;Angell;Sci. Amer.,1983

3. Surface micromachined mechanisms and micromotors;Mehregany;J. Micromech. Microeng.,1991

4. In situ friction and wear measurements in integrated polysilicon mechanisms;Gabriel;Sens. Actuators,1990

5. A study of static friction between silicon and silicon compounds;Deng;J. Micromech. Microeng.,1992

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