Author:
Romig A.D,Dugger Michael T,McWhorter Paul J
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference89 articles.
1. IC-Processed electrostatic micromotors;Long-Shen;Sensors and Actuators,1989
2. IC-processes electrostatic synchronous micromoters;Yu-Chong;Sensors and Actuators,1989
3. Micromotor fabrication;Mehregany;IEEE Transactions Electron Devices,1992
4. Fundamentals of microfabrication: the science of miniturization;Madou,2002
5. Intelligent micromachines: opportunities and challenges of the next si revolution (invited paper);Romig,2001
Cited by
149 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献