Author:
Yalikun Yaxiaer,Tanaka Yo
Funder
ImPACT Program of the Council for Science, Technology, and Innovation (Cabinet Office, Government of Japan)
JSPS KAKENHI
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference48 articles.
1. Micromachined pressure sensors: review and recent developments;Eaton;Smart Struct. Mater.,1997
2. Piezoelectric Materials and Devices- Practice and Applications;Ebrahimi,2013
3. J.-S. Park and G. Y. B., A servo-controlled capacitive pressure sensor with a three-mask fabrication sequence, 2007, 2004, pp. 1–11. https://link.springer.com/chapter/10.1007/978-3-642-59497-7_120.
4. Design of diaphragm and coil for stable performance of an eddy current type pressure sensor;Lee;Sensors,2016
5. Skin-like pressure and strain sensors based on transparent elastic films of carbon nanotubes;Lipomi;Nat. Nanotechnol.,2011
Cited by
23 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献