Applications, materials, and fabrication of micro glass parts and devices: An overview-Reference-Cited by-同舟云学术

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Applications, materials, and fabrication of micro glass parts and devices: An overview

Published:2023-06 Issue: Volume:66 Page:194-220
ISSN:1369-7021
Container-title:Materials Today
language:en
Short-container-title:Materials Today

Author:

Hamed Hazem,Eldiasty Marwan,Seyedi-Sahebari Seyed-Mahmoud,Abou-Ziki Jana D.

Funder

Natural Sciences and Engineering Research Council of Canada

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference260 articles.

1. Microforming technology: theory, simulation and practice;Jiang,2017

2. Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

3. Pneumatically Actuated Thin Glass Microlens for On-Chip Multi-Magnification Observations

4. A.B Shorey et al., IMAPS 2019 - 52nd International Symposium on Microelectronics - Boston, MA USA - Sep. 30-Oct. 3, 2019.

5. Material selection for Micro-Electro-Mechanical-Systems (MEMS) using Ashby's approach

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