Valence band studies of the formation of ultrathin pure silicon nitride films on Si(100)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference18 articles.
1. Roads to ultrathin silicon oxides
2. Electronic structure and optical properties of α and β phases of silicon nitride, silicon oxynitride, and with comparison to silicon dioxide
3. Properties of high-k/ultrahigh purity silicon nitride stacks
4. Preparation and properties of clean Si3N4 surfaces
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