Preparation and properties of clean Si3N4 surfaces
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference83 articles.
1. Surface Oxidation of Silicon Nitride Films
2. Surface stoichiometry, structure, and chemisorption on silicon nitride studied by direct recoiling, x‐ray photoelectron spectroscopy, and Auger electron spectroscopy
3. Thermally grownSi3N4thin films on Si(100): Surface and interfacial composition
4. Silicon nitride thin film production on Si(111)
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2. First-principles study of electron trapping by intrinsic surface states on β-Si3N4 (0001);Surface Science;2020-01
3. Orientation dependent LO and TO phonons absorption in silicon nitride thin films using infrared spectroscopy;ADVANCES IN BASIC SCIENCE (ICABS 2019);2019
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5. Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection;Applied Spectroscopy;2017-07-17
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