Influence of hydrogen on the structural order of microcrystalline silicon during the growth process
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference17 articles.
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2. C.C. Tsai, Plasma deposition of amorphous and crystalline silicon: the effect of hydrogen on the growth, structure and electronic properties, in: H. Fritzsche (Ed.), Amorphous Silicon and Related Materials, Vol. 1, World Scientific Publisher: World Scientific, Singapore, 1988, pp. 123–147.
3. Model for growth of a-Si:H and its alloys;Street;Phys. Rev. B,1991
4. Growth mechanism of microcrystalline silicon deposited by ECRCVD;Beckers;Mater. Res. Soc. Symp. Proc.,1997
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