Microstructures of low‐temperature‐deposited polycrystalline silicon with micrometer grains
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359063
Reference16 articles.
1. Preparation of High-Quality n-Type Poly-Si Films by the Solid Phase Crystallization (SPC) Method
2. Low-temperature fabrication of high-mobility poly-Si TFTs for large-area LCDs
3. Nuclear magnetic resonance study on Si‐H microstructure in hydrogenated amorphous silicon prepared by diluted‐hydrogen and hydrogen‐atom‐treatment methods
4. Bandgap Engineering in Hydrogenated Silicon Films Made by Combined Hydrogen Dilution and Atomic Hydrogen Treatments
5. Evolution of microstructures in hydrogenated silicon films prepared by diluted‐hydrogen and hydrogen‐atom‐treatment methods
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