Analytical and Numerical Study on the Maximum Force Developed by a V-beam Thermal Actuator-Reference-Cited by-同舟云学术

Analytical and Numerical Study on the Maximum Force Developed by a V-beam Thermal Actuator

Published:2014 Issue: Volume:12 Page:359-363
ISSN:2212-0173
Container-title:Procedia Technology
language:en
Short-container-title:Procedia Technology

Author:

Chiorean Radu Stefan,Dudescu Mircea Cristian,Pustan Marius,Hardau Mihail

Publisher

Elsevier BV

Subject

General Earth and Planetary Sciences,General Environmental Science

Reference6 articles.

1. Lobontiu N, Garcia E. Mechanics of Microelectromechanical Systems. Boston: Springer, Kluwer Academic Publishers; 2005.

2. Sinclair MJ. A high force low area MEMS thermal actuator, 7th Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ISBN 0-7803-5912-7, Las Vegas, NV, USA; 2000: 132.

3. Varona J, Tecpoyotl-Torres M, Hamoui AA. Design of MEMS vertical–horizontal chevron thermal actuators, Sensors and Actuators A: Physical, 153(1); 2009:127-130.

4. Luo JK, Flewitt AJ, Spearing SM, Fleck NA, Milne WI. Modelling of microspring thermal actuator. Boston: Proc. NSTI-Nanotech, 1; 2004: 355-358.

5. Sassen WP, Henneken VA, Tichem M, Sarro PM. Contoured thermal V-beam actuator with improved temperature uniformity. Sensors and Actuators A: Physical, 2008; 144(2): 341-347.

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design, Simulation, and Analysis of Micro/Nanoelectromechanical System Rotational Devices;Journal of Nanomaterials;2021-11-09

2. An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum;Journal of Microelectromechanical Systems;2020-06

3. Efficiency enhanced novel 3T heads V-beam microactuator for low power applications;Microsystem Technologies;2017-06-26

4. Fabrication and investigation of low actuation voltage curved beam bistable MEMS switch;Microsystem Technologies;2016-12-20

5. Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators;Journal of Micromechanics and Microengineering;2016-11-23