Contoured thermal V-beam actuator with improved temperature uniformity-Reference-Cited by-同舟云学术

Contoured thermal V-beam actuator with improved temperature uniformity

Published:2008-06 Issue:2 Volume:144 Page:341-347
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Sassen Wouter P.,Henneken Vincent A.,Tichem Marcel,Sarro Pasqualina M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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3. Analysis and design of polysilicon thermal flexure actuator;Huang;J. Micromech. Microeng.,1999

4. Time and frequency response of two-arm micromachined thermal actuators;Hickey;J. Micromech. Microeng.,2003

5. A high force low area MEMS thermal actuator;Sinclair,2000

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