Measurement of the dynamic response of MEMS thermal actuators based on blurred still images by wavelet transform-Reference-Cited by-同舟云学术

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Measurement of the dynamic response of MEMS thermal actuators based on blurred still images by wavelet transform

Published:2016-09 Issue:6 Volume:10 Page:570-576
ISSN:1751-8830
Container-title:IET Science, Measurement & Technology
language:en
Short-container-title:IET Science, Measurement & Technology

Author:

Li Xiuyuan¹,Zhao Yulong¹,Hu Tengjiang¹,Cheng Rongjun¹,Bai Yingwei²

Affiliation:

1. State Key Laboratory for Manufacturing System EngineeringXi'an Jiaotong UniversityXi'anPeople's Republic of China

2. State Key Laboratory of Physics‐Chemistry ResearchShaanxi Applied Physical Chemistry Research InstituteXi'anPeople's Republic of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/iet-smt.2015.0292

Reference24 articles.

1. Bent‐beam electrothermal actuators – part I: single beam and cascaded devices;Long Q.;J. Microelectromech. Syst.,2001

2. Contoured thermal V‐beam actuator with improved temperature uniformity;Wouter P.S.;Sens. Actuators A,2008

3. Improved designs for an electrothermal in‐plane microactuator;Alex M.H.K.;J. Microelectromech. Syst.,2012

4. Bent-beam strain sensors

5. Analytical model for analysis and design of V‐shaped thermal microactuators;Enikov E.T.;J. Microelectromech. Syst.,2005

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