Improved Designs for an Electrothermal In-Plane Microactuator-Reference-Cited by-同舟云学术

Improved Designs for an Electrothermal In-Plane Microactuator

Published:2012-06 Issue:3 Volume:21 Page:586-595
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Kwan Alex Man Ho,Song Sichao,Lu Xing,Lu Lei,Teh Ying-Khai,Teh Ying-Fei,Chong Eddie Wing Cheung,Gao Yan,Hau William,Zeng Fan,Wong Man,Huang Chunmei,Taniyama Akira,Makino Yoshihide,Nishino So,Tsuchiya Toshiyuki,Tabata Osamu

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/6205673/06156413.pdf?arnumber=6156413

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