Design of MEMS vertical–horizontal chevron thermal actuators-Reference-Cited by-同舟云学术

Design of MEMS vertical–horizontal chevron thermal actuators

Published:2009-06 Issue:1 Volume:153 Page:127-130
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Varona Jorge,Tecpoyotl-Torres Margarita,Hamoui Anas A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Design and modeling of a MEMS bidirectional vertical thermal actuator;Yan;J. Micromech. Microeng.,2004

2. Design and fabrication of reflective spatial light modulators for high-dynamic-range wavefront control;Zhu;Proc. SPIE,2004

3. A high force low area MEMS thermal actuator;Sinclair,2000

4. Bi-directional movable latched micromechanism using one-directional movable chevron electrothermal actuators for switch and relay applications;Chen;Microproc. Nanotech. Conf.,2003

5. Analysis and design of polysilicon thermal flexure actuator;Huang;J. Micromech. Microeng.,1999

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