Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators-Reference-Cited by-同舟云学术

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Closed-form modelling and design analysis of V- and Z-shaped electrothermal microactuators

Published:2016-11-23 Issue:1 Volume:27 Page:015023
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zhang Zhuo,Zhang Weize,Wu Qiyang,Yu Yueqing,Liu Xinyu,Zhang Xuping

Funder

The National Natural Science Foundation of China

The China Scholarship Council

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/27/i=1/a=015023/pdf

Reference28 articles.

1. A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

2. Electrothermal properties and modeling of polysilicon microthermal actuators

3. Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator

4. Bidirectional Electrothermal Actuator With Z-Shaped Beams

5. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type

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2. An analytical nonlinear displacement model of electrothermal V-shaped actuator;Vietnam Journal of Mechanics;2024-06-29

3. Nonlinear Displacement of the Electrothermal V-Shaped Actuator;Shock and Vibration;2024-05-02

4. Study on Safe Working Condition of the Electrothermal U-Shaped Actuator;Integrated Ferroelectrics;2024-01-02

5. Giảm thấp điện áp dẫn của bộ vi kích hoạt điện nhiệt dạng dầm chữ V bằng phương pháp phún xạ bề mặt;Journal of Military Science and Technology;2023-12-25

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