Energy and dose dependence of ion beam mixing of Cu and W-Reference-Cited by-同舟云学术

Energy and dose dependence of ion beam mixing of Cu and W

Published:1986 Issue:1-6 Volume:18 Page:54-58
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Westendorp J.F.M.,Littmark U.,Saris F.W.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference16 articles.

1. Impurity profile broadening and shifts by ion beam mixing

2. Ion beam mixing in amorphous silicon II. Theoretical interpretation

3. Theoretical aspects of atomic mixing by ion beams

4. Recoil mixing in solids by energetic ion beams

5. The depth resolution of sputter profiling

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