Formation of luminescent structures on Cz-silicon by hydrogen plasma treatments and oxidation-Reference-Cited by-同舟云学术

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Formation of luminescent structures on Cz-silicon by hydrogen plasma treatments and oxidation

Published:2002-01 Issue:1-4 Volume:186 Page:132-137
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Job R,Ulyashin A.G,Fahrner W.R

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference18 articles.

1. Hydrogen in Semiconductors;Pankove,1991

2. Hydrogen in Crystalline Semiconductors;Pearton,1992

3. Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Surface modification and oxidation of Si wafers after low energy plasma treatment in hydrogen, helium and argon;Materials Science in Semiconductor Processing;2013-12

2. Electrodeposition of Silicon Thin Films from Ionic Liquids;ECS Transactions;2010-02-22

3. Porous‐like structures prepared by temperature‐pressure treatment of heavily hydrogenated silicon;physica status solidi (c);2005-06

4. Structuring of Silicon Wafer Surfaces on the Sub-100 nm Scale by Hydrogen Plasma Treatments;MRS Proceedings;2003

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