Author:
Osipowicz T,van Kan J.A,Sum T.C,Sanchez J.L,Watt F
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
30 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. New Generation Electron Beam Resists: A Review;Chemistry of Materials;2017-02-27
2. Fabrication of three-dimensional SU-8 microchannels by proton beam writing for microfluidics applications: Fluid flow characterisation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04
3. Greyscale proton beam writing in p-type Gallium Arsenide;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
4. Ion Beams for Materials Engineering—An Overview;Swift Heavy Ions for Materials Engineering and Nanostructuring;2011
5. Optical proximity correction for a versatile LCD based direct write maskless photoplotter;Microelectronic Engineering;2009-12