Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics-Reference-Cited by-同舟云学术

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Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics

Published:1995-03 Issue:3 Volume:45 Page:349-365
ISSN:0969-806X
Container-title:Radiation Physics and Chemistry
language:en
Short-container-title:Radiation Physics and Chemistry

Author:

Ehrfeld W.,Lehr H.

Publisher

Elsevier BV

Subject

Radiation

Reference50 articles.

1. Int. Congress on Optical Science and Engineering;Anderer,1988

2. KfK-Report 4702;Anderer,1990

3. KfK-Report 3961;Becker,1985

4. Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

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