Author:
Diering D.,Spemann D.,Lenzner J.,Müller St.,Böntgen T.,von Wenckstern H.
Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
3 articles.
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1. Fabrication of fine imaging devices using an external proton microbeam;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-08
2. Resist materials for proton beam writing: A review;Applied Surface Science;2014-08
3. Integration of nano-scale components and supports in micromachined 3D silicon structures;Journal of Micromechanics and Microengineering;2014-03-10