Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits

Author:

van Kan J.A,Sum T.C,Osipowicz T,Watt F

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference11 articles.

1. H. Lorenz et al., Proceedings of MME’96 (Micro Mechanics Europe), Barcelona, Spain, October 1996

2. The use of proton microbeams for the production of microcomponents

3. J.A. van Kan, J.L. Sanchez, T. Osipowicz, F. Watt, microsystem technologies, accepted (HARMST conference ’99)

4. Resist materials for proton micromachining

5. Micromachining using focused high energy ion beams: Deep Ion Beam Lithography

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