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Nucleation and growth of platelet bubble structures in He implanted silicon

  • Published:1998-03 Issue: Volume:136-138 Page:460-464
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Fichtner P.F.P.,Kaschny J.R.,Kling A.,Trinkaus H.,Yankov R.A.,Mücklich A.,Skorupa W.,Zawislak F.C.,Amaral L.,da Silva M.F.,Soares J.C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

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