Author:
Yankov R.A.,Kaschny J.R.,Fichtner P.F.P.,Mücklich A.,Kreißig U.,Skorupa W.
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Proc. 6th Int. Symp. on Silicon-on-insulator Technology and Devices;Cullen,1994
2. Gettering of Cu and Ni Impurities in SIMOX Wafers
3. Proximity gettering of transition metals in separation by implanted oxygen structures
4. E-MRS 1996 Spring Meeting (New Trends in Ion Beam Processing of Materials);Yankov,1966
5. XI International Conference on Ion Implantation Technology;Skorupa,1996
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献