Interaction of copper with cavities in silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.361031
Reference31 articles.
1. Transition metals in silicon and their gettering behaviour
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3. Direct comparison of ion−damage gettering and phosphorus−diffusion gettering of Au in Si
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5. Proximity Gettering of Heavy Metals by High-Energy Ion Implantation
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