Gettering of gold and copper with implanted carbon in silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99263
Reference19 articles.
1. Gettering In Silicon
2. Gettering of Impurities in Silicon
3. Metal Precipitates in Silicon p‐n Junctions
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