Thermally induced interfacial interactions between various metal substrates and a-SiC thin films deposited by a polymer-source chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference33 articles.
1. Effect of radio-frequency bias voltage on the optical and structural properties of hydrogenated amorphous silicon carbide
2. Dielectric properties of amorphous hydrogenated silicon carbide thin films grown by plasma-enhanced chemical vapor deposition
3. Linear dependence of both the hardness and the elastic modulus of pulsed laser deposited a-SiC films upon their Si–C bond density
4. Physics of low density-of-states a-Si1−xCx films
5. Wide optical band gap window layers for solar cells
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1. Review—Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: Trends in Deposition Techniques and Related Applications;ECS Journal of Solid State Science and Technology;2017
2. Characterization of structures and properties of amorphous nanostructured SiC thin films deposited on AISI 304 stainless steel using pulsed laser deposition;Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems;2013-09-19
3. Prospects of chemical vapor grown silicon carbide thin films using halogen-free single sources in nuclear reactor applications: A review;Journal of Materials Research;2012-07-31
4. Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition;Thin Solid Films;2010-03
5. Structural and mechanical properties of amorphous silicon carbonitride films prepared by vapor-transport chemical vapor deposition;Surface and Coatings Technology;2009-11
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