Linear dependence of both the hardness and the elastic modulus of pulsed laser deposited a-SiC films upon their Si–C bond density
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366249
Reference25 articles.
1. On the differences between a-SiC:H films deposited with and without fluorine
2. Physics of Amorphous Silicon–Carbon Alloys
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5. R.F. reactive sputter deposition of hydrogenated amorphous silicon carbide films
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