Study on structural, morphological and electrical properties of sputtered titanium nitride films under different argon gas flow
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference25 articles.
1. Different approaches to superhard coatings and nanocomposites
2. Background of the titanium nitride deposition
3. Variation of color in titanium and zirconium nitride decorative thin films
4. Deposition processes and metal cutting applications of TiN coatings
5. Synthesis of cubic titanium nitride phases by anodization
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