Influence of negative substrate bias voltage on the impurity concentrations in Zr films
Author:
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
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1. Highly conformal ZrO2 deposition for dynamic random access memory application
2. Structural and dielectric properties of thin ZrO2 films on silicon grown by atomic layer deposition from cyclopentadienyl precursor
3. Metalorganic precursor decomposition and oxidation mechanisms in plasma-enhanced ZrO2 deposition
4. Trace Impurity Analysis in Ta Films Using Glow Discharge Mass Spectrometry: Concentration Change of Impurities by Applying Negative Substrate Bias Voltage
5. Aspects of quantitative secondary ion mass spectrometry
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