X-ray characterization of crystal perfection and surface contamination in large-diameter silicon wafers
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference42 articles.
1. The 300 mm silicon wafer — a cost and technology challenge
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5. Dedication;Dynamical Theory of X-Ray Diffraction;2003-11-06
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