Author:
Takahashi Kenji,Kawashima Kenichi
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference6 articles.
1. Japan 300-mm Semiconductor Technology (J300) Conference, November 1994.
2. H. Thuchikawa, Proc. SEMI Technology. Symp. 96, Chiba, 8 (1996).
3. H. Komiya, Symp. on VLSI Technol, Kyoto, 1 (1997).
4. National Technology Roadmap for Semiconductors (SIA) (1997, 1999).
5. H. Komiya, Symp. on VLSI Technology, Kyoto, 1 (1997).
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