Makyoh topography: a simple yet powerful optical method for flatness and defect characterization of mirror-like surfaces
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Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. The effects of the global surface curvature on Makyoh-topogaphy imaging;Photonics Letters of Poland;2019-04-03
2. Structured-illumination Makyoh-topography: optimum grid position and its constraints;Surface Topography: Metrology and Properties;2018-11-20
3. Defect structure and strain reduction of 3C-SiC/Si layers obtained with the use of a buffer layer and methyltrichlorosilane addition;CrystEngComm;2016
4. Thermo-mechanical design and characterization of low dissipation micro-hotplates operated above 500°C;Microelectronics Journal;2014-12
5. Optical Characteristics of Concave and Convex Defects on Steel Sheets for Low-angle Incident Light and Its Application to Defect Inspection;Transactions of the Society of Instrument and Control Engineers;2014
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