Morphological changes of the Si [100] surface after treatment with concentrated and diluted HF
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference17 articles.
1. Spectroscopic ellipsometry studies of HF treated Si (100) surfaces
2. Influence of HF‐H2O2treatment on Si(100) and Si(111) surfaces
3. Kinetics of oxidation on hydrogen-terminated Si(100) and (111) surfaces stored in air
4. The Evolution of Silicon Wafer Cleaning Technology
5. Chemistry at silicon crystalline surfaces
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