Structure and properties of arc evaporated nanoscale TiN/MoN multilayered systems

Author:

Pogrebnjak A.D.,Eyidi D.,Abadias G.,Bondar O.V.,Beresnev V.M.,Sobol O.V.

Publisher

Elsevier BV

Subject

General Medicine

Reference30 articles.

1. Correlation between interfacial electronic structure and mechanical properties of ZrN/SiNx films;Meng;Mater Lett,2013

2. In situ stress evolution during magnetron sputtering of transition metal nitride thin films;Abadias;Appl Phys Lett,2008

3. Epitaxial stabilization of cubic-SiNx in TiN∕ SiNx multilayers;Soderberg;Appl Phys Lett,2006

4. Investigation of element profiles, defects, phase composition and physical and mechanical properties of superhard coatings Ti–Hf–Si–N;Pogrebnjak;Mater Sci Appl,2013

5. Structure and mechanical properties of σ-NbN/SiNx and σ′-NbN/SiNx nano-multilayer films deposited by reactive magnetron sputtering;Wen;Surf Coat Technol,2009

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