Microstructures and mechanical properties of MoNx isomeric multilayer films with different number of layers deposited by DC magnetron sputtering-Reference-Cited by-同舟云学术

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Microstructures and mechanical properties of MoNx isomeric multilayer films with different number of layers deposited by DC magnetron sputtering

Published:2023-05 Issue: Volume:28 Page:101714
ISSN:2589-1529
Container-title:Materialia
language:en
Short-container-title:Materialia

Author:

Sun Li,Mao Jiaheng,Li Yucheng,Zhou Quan,Yuan Zhigang,Xiong Xiaoshuang,Fang Qianfeng,Gong Wenbang,Lu Jijun,Tang Lingbo,Su Gongbing,Mei Shunqi

Publisher

Elsevier BV

Subject

General Materials Science

Reference39 articles.

1. Restricting dislocation movement in transition metal carbides by phase stability tuning;Hugosson;Science,2001

2. Effect of nitrogen flow rate on structure and properties of MoNx coatings deposited by facing target sputtering;Wang;J. Alloys Compd.,2017

3. Influence of the deposition parameters on the texture and mechanical properties of magnetron sputtered cubic MoNx thin films;Tillmann;Materialia,2019

4. The impact of nitrogen content and vacancies on structure and mechanical properties of Mo–N thin films;Klimashin;J. Appl. Phys.,2016

5. Synthesis of nanocrystalline δ-MoN by thermal annealing of amorphous thin films grown on (100) Si by reactive sputtering at room temperature;Haberkorn;Thin Solid Films,2018

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