Effect of nitrogen flow rate on structure and properties of MoNx coatings deposited by facing target sputtering-Reference-Cited by-同舟云学术

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Effect of nitrogen flow rate on structure and properties of MoNx coatings deposited by facing target sputtering

Published:2017-04 Issue: Volume:701 Page:1-8
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Wang Tao,Zhang Guojun,Ren Shuai,Jiang Bailing

Funder

National Natural Science Foundation

Science Technology Co-ordination Innovation Project of Shaanxi Province

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference36 articles.

1. Hard coatings with high temperature adaptive lubrication and contact thermal management: review;Voevodina;Surf. Coat. Technol.,2014

2. Microstructural design of hard coatings;Mayrhofer;Prog. Mater. Sci.,2006

3. Coating applications for cutting tools;Schleinkofer,2014

4. PVD and CVD hard coatings;Mitterer,2014

5. Deposition and characterisation of Mo2N/CrN multilayer coatings prepared by cathodic arc evaporation;Gilewicz;Surf. Coat. Technol.,2015

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