Amorphous NTTO optical composite films were deposited by N2-Ar flow ratio gradient RF magnetron sputtering-Reference-Cited by-同舟云学术

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Amorphous NTTO optical composite films were deposited by N2-Ar flow ratio gradient RF magnetron sputtering

Published:2024-08 Issue: Volume:154 Page:115808
ISSN:0925-3467
Container-title:Optical Materials
language:en
Short-container-title:Optical Materials

Author:

Chao Rui^ORCID,Cai Haichao,Li Hang,Lv Wenxue,Xue Yujun

Publisher

Elsevier BV

Reference52 articles.

1. Structure and optical analysis of Ta2O5 deposited on infrasil substrate;Azim;Appl. Surf. Sci.,2009

2. Optical grade SiO2 films prepared by HWCVD;Sittinger;Surf. Coating. Technol.,2018

3. High-rate reactive high-power impulse magnetron sputtering of hard and optically transparent HfO2 films;Vlček;Surf. Coating. Technol.,2016

4. Structural, optical and electrical properties of DC reactive magnetron sputtered (Ta2O5)(1-x)(TiO2)(x) thin films;Sekhar;Ceram. Int.,2016

5. Optical properties of amorphous Ta2O5 thin films deposited by RF magnetron sputtering;Chen;Opt. Mater.,2019

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