Investigation of surface charging of insulating materials due to secondary particle emission using a new dual beam instrument-Reference-Cited by-同舟云学术

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Investigation of surface charging of insulating materials due to secondary particle emission using a new dual beam instrument

Published:1992-10 Issue:1-2 Volume:120 Page:129-155
ISSN:0168-1176
Container-title:International Journal of Mass Spectrometry and Ion Processes
language:en
Short-container-title:International Journal of Mass Spectrometry and Ion Processes

Author:

Beck Scott T,Appelhans Anthony D.,Delmore James E.,Dahl David A.

Publisher

Elsevier BV

Subject

Spectroscopy

Reference20 articles.

1. Neutralization of sample charging in secondary ion mass spectrometry via a pulsed extraction field

2. Measurement and visual observation of sample charging effects on primary beam focusing in secondary ion mass spectrometry

3. Charging of insulators by ion bombardment and its minimization for secondary ion mass spectrometry (SIMS) measurements

4. Analysis of polymer surfaces by SIMS 1. An investigation of practical problems

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dielectric response of sputtered transition metal oxides;Journal of Applied Physics;2004-06-15

2. Detection of 2-chloroethyl ethyl sulfide and sulfonium ion degradation products on environmental surfaces using static SIMS;Environmental Science & Technology;1995-08

3. Measurement of sample charging during sputtering of III–V materials and devices;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-08

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