Measurement and visual observation of sample charging effects on primary beam focusing in secondary ion mass spectrometry-Reference-Cited by-同舟云学术

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Measurement and visual observation of sample charging effects on primary beam focusing in secondary ion mass spectrometry

Published:1989-04 Issue:2-3 Volume:88 Page:161-173
ISSN:0168-1176
Container-title:International Journal of Mass Spectrometry and Ion Processes
language:en
Short-container-title:International Journal of Mass Spectrometry and Ion Processes

Author:

Appelhans Anthony D.

Publisher

Elsevier BV

Subject

Spectroscopy

Reference17 articles.

1. Beam techniques for the analysis of poorly conducting materials

2. Analysis of polymer surfaces by SIMS 1. An investigation of practical problems

3. A comparison of atom and ion induced SSIMS—Evidence for a charge induced damage effect in insulator materials

4. Neutral and ion beam SIMS of non-conducting materials

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An Introduction to Cluster Secondary Ion Mass Spectrometry (Cluster SIMS);Cluster Secondary Ion Mass Spectrometry;2013-04-15

2. Accurate ultra-low-energy secondary ion mass spectrometry analysis of wide bandgap GaN/In x Ga1-x N structures using optical conductivity enhancement;Rapid Communications in Mass Spectrometry;2010-06-15

3. Different optical conductivity enhancement (OCE) protocols to eliminate charging during ultra low energy SIMS profiling of semiconductor and semi-insulating materials;Applied Surface Science;2006-07

4. Electron flood charge compensation device for ion trap secondary ion mass spectrometry;International Journal of Mass Spectrometry;2002-11

5. Investigation of surface charging of insulating materials due to secondary particle emission using a new dual beam instrument;International Journal of Mass Spectrometry and Ion Processes;1992-10

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