Deep X-Ray Lithography
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Elsevier
Reference32 articles.
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1. Recent progress in grating-based microscopic x-ray phase tomography;Developments in X-Ray Tomography XIV;2022-10-14
2. Investigation on the mechanical interface stability of curved high aspect ratio x-ray gratings made by deep x-ray lithography;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-05-25
3. Noise Reduction for Single-Shot Grating-Based Phase-Contrast Imaging at an X-ray Backlighter;Journal of Imaging;2021-09-05
4. Development of stacked conductive templates for electroforming of multi-level metallic micro components;Microsystem Technologies;2019-11-25
5. Talbot-Lau x-ray phase-contrast setup for fast scanning of large samples;Scientific Reports;2019-03-12
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