Investigation on the mechanical interface stability of curved high aspect ratio x-ray gratings made by deep x-ray lithography-Reference-Cited by-同舟云学术

Investigation on the mechanical interface stability of curved high aspect ratio x-ray gratings made by deep x-ray lithography

Published:2022-05-25 Issue:02 Volume:21 Page:
ISSN:2708-8340
Container-title:Journal of Micro/Nanopatterning, Materials, and Metrology
language:
Short-container-title:J. Micro/Nanopattern. Mats. Metro.

Author:

Richter Michael¹,Beckenbach Thomas²,Daerr Heiner³,Prevrhal Sven³,Börner Martin¹,Gutekunst Josephine¹,Zangi Pouria¹,Last Arndt¹,Korvink Jan G.¹,Meyer Pascal¹

Affiliation:

1. Karlsruhe Institute of Technology, Institute of Microstructure Technology, Eggenstein-Leopoldshafen

2. microworks GmbH, Karlsruhe

3. Philips GmbH Innovative Technologies, Research Laboratories Hamburg, Hamburg

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Arts and Humanities

Reference21 articles.

1. Dark-field computed tomography reaches the human scale

2. X-ray dark-field chest imaging for detection and quantification of emphysema in patients with chronic obstructive pulmonary disease: a diagnostic accuracy study

3. Implementation of a Talbot-Lau interferometer in a clinical-like c-arm setup: A feasibility study

4. X-ray phase imaging reaching clinical uses

5. Towards clinical grating-interferometry mammography

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