1. Progress in EUV lithography toward manufacturing;Kim;Proc. SPIE,2017
2. Mix-and-match considerations for EUV insertion in N7 HVM;Chen;Proc. SPIE.,2017
3. Performance overview and outlook of EUV lithography systems;Pirati;Proc. SPIE,2015
4. EUV lithography performance for manufacturing: status and outlook;Pirati;Proc. SPIE,2016
5. The future of EUV lithography: enabling Moore's Law in the next decade;Pirati;Proc. SPIE.,2017