Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper-Reference-Cited by-同舟云学术

Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper

Published:2021-11 Issue: Volume:210 Page:110114
ISSN:0264-1275
Container-title:Materials & Design
language:en
Short-container-title:Materials & Design

Author:

Dogan Gül^ORCID,Chiu Frank,Chen Sam U.H.,David Mebil R.T.,Michalowski Andreas,Schänzel Michael,Silber Christian,Schütz Gisela,Grévent Corinne,Keskinbora Kahraman

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference74 articles.

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