Chemical Stability of Titania and Alumina Thin Films Formed by Atomic Layer Deposition
Author:
Affiliation:
1. Department of Materials Science & Engineering and Center for Advanced Materials and Nanotechnology, Lehigh University, Bethlehem, Pennsylvania 18015, United States
Funder
Lehigh University
Division of Materials Research
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.5b03278
Reference25 articles.
1. Al2O3 and TiO2 Atomic Layer Deposition on Copper for Water Corrosion Resistance
2. Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200 °C
3. Atomic Layer Deposition: An Overview
4. Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates
5. Amorphous TiO 2 coatings stabilize Si, GaAs, and GaP photoanodes for efficient water oxidation
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