Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference36 articles.
1. Particle technology in chemical mechanical planarization;Gokhale;Kona-Powder and Particle,2007
2. Moore's law: past, present, and future;Schaller;IEEE Spectrum,1997
3. Perspective-electrochemical assessment of slurry formulations for chemical mechanical planarization of metals: trends, benefits and challenges;Roy;ECS J. Solid State Sci. Technol.,2018
4. Enhanced open innovation: CMP innovation to open new paradigm;Tsujimura;ECS J. Solid State Sci. Technol.,2019
5. Chemical mechanical planarization: slurry chemistry, materials, and mechanisms;Krishnan;Chem. Rev.,2010
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献