Polymer coated γ-aminopropyltriethoxysilane-modified α-alumina non-spherical nanocomposite abrasives and their chemical mechanical polishing behavior on glass-ceramic substrate
Author:
Funder
National Natural Science Foundation of China
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Polymers and Plastics,General Chemical Engineering
Link
https://link.springer.com/content/pdf/10.1007/s13726-023-01250-0.pdf
Reference56 articles.
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3. Bifano TG, Bierden PA (1997) Fixed-abrasive grinding of brittle hard-disk substrates. Int J Mach Tools Manuf 37:935–946
4. Zhong ZW (2020) Recent developments and applications of chemical mechanical polishing. Int J Adv Manuf Technol 109:1419–1430
5. Kim J, Kwak D, Park J, Kubota T, Kim T (2022) Effects of aging time in hydrogen peroxide-glycine-based Cu CMP slurry. Mater Sci Semicond Process 140:106343
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