Plasma-induced damage and annealing repairing in ALD-Al2O3/PECVD-SiNx stacks-Reference-Cited by-同舟云学术

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Plasma-induced damage and annealing repairing in ALD-Al2O3/PECVD-SiNx stacks

Published:2019-09 Issue: Volume:100 Page:214-219
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Li Shizheng,Yang Ning,Yuan Xiao,Ye Xiaojun,Wang Liangxing,Zheng Fei,Liu Cui,Li Hongbo

Funder

Shanghai Municipal Project

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference37 articles.

1. Surface passivation of high-efficiency silicon solar cells by atomic-layer-deposited Al2O3;Schmidt;Prog. Photovolt.,2008

2. Very low surface recombination velocities on p- and n-type c-Si by ultrafast spatial atomic layer deposition of aluminum oxide;Werner;Appl. Phys. Lett.,2010

3. Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells;Dingemans;J. Vac. Sci. Technol. A,2012

4. High efficiency n-type Si solar cells on Al2O3-passivated boron emitters;Benick;Appl. Phys. Lett.,2008

5. Thin Al2O3 passivated boron emitter of n-type bifacial c-Si solar cells with industrial process;Lu;Prog. Photovolt.,2017

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Vertical sidewall of silicon nitride mask and smooth surface of etched-silicon simultaneously obtained using CHF3/O2 inductively coupled plasma;Vacuum;2023-01

2. Chemical stoichiometry effect of hafnium oxide (HfOx) for passivation layer of PERC solar cells;Materials Science in Semiconductor Processing;2022-09

3. One-step preparation of TiO2 anti-reflection coating and cover layer by liquid phase deposition for monocrystalline Si PERC solar cell;Solar Energy Materials and Solar Cells;2022-01

4. Tuning back side passivation for enhancing the performance of PERC solar cells;Solar Energy Materials and Solar Cells;2021-10

5. Simulation of a Charged Al2O3 Film as an Assisting Passivation Layer for a-Si Passivated Contact P-Type Silicon Solar Cells;Silicon;2021-04-19

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