Chemical stoichiometry effect of hafnium oxide (HfOx) for passivation layer of PERC solar cells
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference42 articles.
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4. Industrial silicon solar cells applying the passivated emitter and rear cell (PERC) concept—A review;Dullweber;IEEE J. Photovoltaics,2016
5. Development of the PERC solar cell;Blakers;IEEE J. Photovoltaics,2019
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3. Effect of films thickness and hydrogen annealing on passivation performance of plasma ALD based Hafnium oxide films;Physica Scripta;2024-04-23
4. ALD deposited bipolar HfOx films for silicon surface passivation;Surfaces and Interfaces;2023-10
5. High-Quality Silicon Surface Passivation by Thermal-ALD Deposited Hafnium Oxide Films;IEEE Journal of Photovoltaics;2023-09
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