Atomic layer deposition and annealing of Ga doped ZnO films-Reference-Cited by-同舟云学术

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Atomic layer deposition and annealing of Ga doped ZnO films

Published:2019-10 Issue: Volume:101 Page:95-102
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Szabó Zoltán,Volk János,Horváth Zsolt Endre,Medveczky Zsófia,Czigány Zsolt,Vad Kálmán,Baji Zsófia

Funder

Hungarian National Science Fund OTKA

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference23 articles.

1. Transparent conducting oxide semiconductors for transparent electrodes;Minami;Semicond. Sci. Technol.,2005

2. Transparent conducting oxides for electrode applications in light emitting and absorbing devices;Liu;Superlattice. Microst.,2010

3. Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering;Kim;J. Mater. Res.,2005

4. InGaN based light emitting diodes with Ga doped ZnO as transparent conducting oxide;Li;Phys. Status Solidi,2010

5. Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition;Nam;Appl. Surf. Sci.,2014

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1. Probing electronic and dielectric properties of ultrathin Ga2O3/Al2O3 atomic layer stacks made with in vacuo atomic layer deposition;Journal of Applied Physics;2024-07-10

2. Evaluation of the Electronic Properties of Atomic Layer Deposition-Grown Ge-Doped Zinc Oxide Thin Films at Elevated Temperatures;Electronics;2024-01-30

3. Bandgap Tunable ZnGaO Thin Films Grown by Atomic Layer Deposition for High-Performance Ultraviolet Photodetection;ACS Materials Letters;2023-09-25

4. Work Function Estimation of Gallium-Doped Zinc Oxide Using Transparent Gate Electrode MOSFET;ECS Journal of Solid State Science and Technology;2023-03-01

5. Synthesis chemical methods for deposition of ZnO, CdO and CdZnO thin films to facilitate further research;Journal of Alloys and Compounds;2022-12

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