Influences of nitridation treatment on the properties of semi-polar (11 2‾2) plane AlGaN films
Author:
Funder
Jinling Institute of Technology
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference29 articles.
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4. Reducing the grain density in semipolar (11-22) AlGaN surfaces on m-plane sapphire substrates;Foronda;Jpn. J. Appl. Phys.,2019
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1. Improved characteristics of (11 2‾2) plane AlGaN films grown on SiNx interlayer;Materials Science in Semiconductor Processing;2024-10
2. Improved characteristics of (112‾2) Al0.62Ga0.38N film grown with pulsed flow growth technique;Materials Science in Semiconductor Processing;2024-10
3. Effects of Cp2Mg molar flow rate on structural, optical, and electrical properties of semipolar Mg-doped p-AlGaN epi-layers;Optical Materials;2024-06
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